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Which etch process can be used during solar cell processing?

The etching process can be physical and/or chemical, wet or dry, and isotropic or anisotropic. All these etch process variations can be used during solar cell processing. Figure 1: Etching processes divided according to their physical, chemical, or combined (physical and chemical) nature.

Why is Etch A chemically unselective process?

be chemically unselective – depends only on the surface binding energy and the masses of the targets and projectiles, be very sensitive to the angle of incidence of the ion and therefore anisotropic in nature, and the only etch process able to remove involatile products from the surface.

What is the etching process?

Each etching process consisted of two steps: (1) first etching carried out using a nitric acid (HNO 3) and hydrofluoric acid (HF) mixture and potassium hydroxide (KOH), (2) second etching carried out using phosphoric acid (H 3 PO 4) and a HNO 3 and HF mixture.

What is the etch rate of alkaline etch solutions?

The etch rate of alkaline etch solutions are generally lower than at he etch rates of acidic etching solutions. Consequently, alkaline etch processes are often performed at high temperatures (70-80 °C). Alkaline etching is typically anisotropic with an etch rate of 1-2 µm/min for low concentration (1-5% v/v) alkaline solutions.

What is a typical etch rate?

The typical etch rates are 2-4 µm/min at 6-10 °C. Due to the different grain orientations within the same multicrystalline silicon wafer, acidic etching is used to texture this type of material. Acidic solutions are also used to perform defect etching (e.g. Sopori etching ).

What makes a good etching?

An important requirement for a successful etching is a clean and defect-free surface. Scratches, lapping marks and deformations on the sample, although barely visible under brightfield microscopy after polishing, will be exposed after etching. Such sample preparation artifacts can then severely complicate the image analysis of the etched samples.

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Etching

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